About: http://webisa.webdatacommons.org/226967115

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a graph that depicts results of LWR and EWR measurements for resist samples subjected to the multistep ion implantation processes of FIG. 6.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com