PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The comparison that is performed each time that an inspection is performed for the layer of any wafer may be performed according to any embodiments described herein (e.g., including steps such as normalization of the randomly generated defects).
http://www.w3.org/ns/prov#wasQuotedFrom
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