| http://www.w3.org/ns/prov#value | - te devices (such as semiconductor chips such as ICs, LCDs, CCDs, and the like). [0027]FIG. 7 is a detailed flowchart of a wafer process in Step 4 of FIG. 6. [0028]FIG. 8 is a typical sectional view of a conventional crystallization apparatus of the Vertical Gradient Freezing method.
|
