About: http://webisa.webdatacommons.org/230553476

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method as claimed in claim 1 wherein said base substrate is made of a material selected from a group including silicon, polysilicon, silicon carbide, metal, and insulator.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com