| http://www.w3.org/ns/prov#value | - As the insulating film 102, a single layer structure or a multilayer structure of insulating films containing nitrogen or oxygen such as silicon oxide (SiOx), silicon nitride (SiNx), silicon oxynitride (SiOxNy) (x>y), or silicon nitride oxide (SiNxOy) (x>y) formed by a sputtering method, an LPCVD method, a plasma CVD method or the like, can be employed.
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