About: http://webisa.webdatacommons.org/232716499

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	At this step S12, the substrate processing apparatus alters metal contaminants such as Fe and Cu adhering to the surface of the substrate W to hydroxides by supplying the alkaline solution.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com