About: http://webisa.webdatacommons.org/235951478

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 1a and 1b, respectively, are a perspective view and a cross sectional view showing a sensor unit wafer of this invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com