About: http://webisa.webdatacommons.org/236353384

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a graph which plots the number of particles observed on wafers dried via various IPA concentrations and various flow rates;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com