About: http://webisa.webdatacommons.org/236854258

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Hard masks can damage the surface of the substrate being bumped (the receiving substrate) especially if the receiving substrate is a semiconductor wafer or an integrated circuit (IC).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com