About: http://webisa.webdatacommons.org/23700917

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is extremely difficult to planarize a metal surface, particularly a copper surface, as of a damascene inlay as shown in FIGS. 1A and 1B, with a high degree of surface planarity using a chemical mechanical polishing process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com