About: http://webisa.webdatacommons.org/238182854

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Described in conjunction with FIGS. 1 through 9 below is an embodiment of the present invention adapted for application to plasma etching operations.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com