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About:
http://webisa.webdatacommons.org/239366090
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http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value
An insulator is deposited on the wafer and planarized, using CMP or other planarizing technology.
http://www.w3.org/ns/prov#wasQuotedFrom
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