About: http://webisa.webdatacommons.org/248442810

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It should be noted that the pressure of treatment furnace 2 may be set to a range from 10 Pa to 300 Pa, more especially from 10 Pa to 200 Pa which is a process pressure of an ordinary low-pressure CVD.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr