About: http://webisa.webdatacommons.org/249196492

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, since there is a tendency for the optimal thickness of the layer to be oxidized to become thinner, thickness control becomes more difficult.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com