| http://www.w3.org/ns/prov#value | - 20140106576INORGANIC POLYSILAZANE, SILICA FILM-FORMING COATING LIQUID CONTAINING SAME, AND METHOD FOR FORMING SILICA FILM - Disclosed is an inorganic polysilazane that undergoes less shrinkage during a calcination step in an oxidizing agent such as water vapor and is less prone to allow a silica film to suffer from the formation of cracks or peel off from a semiconductor substrate, and a silica fi
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