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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5A is a diagram showing a fluorescent X-ray spectrum in the vicinity of Ar-K?? of the piezoelectric thin film when the Ar content is 32 ppm in the piezoelectric thin film element in Example 2;
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com