| http://www.w3.org/ns/prov#value | - n 201325 Jul 2013Elpida Memory, Inc.Semiconductor device including stacked semiconductor chips* Cited by examinerClassifications U.S. Classification257/686, 257/E25.013, 257/207, 257/774, 257/E23.179, 257/203, 257/723, 257/211, 257/696, 257/208, 257/E23.146, 257/685, 257/777International ClassificationH01L23/52, H01L25/18, G11C11/401, H01L25/065, G11C8/00Cooperative ClassificationH01L23/5226, H01L
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