About: http://webisa.webdatacommons.org/266169873

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In step 207 the organosilicon compound is vaporized and combined with an inert carrier gas and the combined organosilicon/carrier gas mixture introduced to the processing chamber through a gas distribution plate, such as a showerhead.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com