| http://www.w3.org/ns/prov#value | - In another embodiment, barrier layer 22 may be a material such as aluminum nitride (AIN), silicon nitride (Si3N4), tantalum oxide (Ta2O5), yttrium oxide (Y2O3), magnesium oxide (MgO), zirconium oxide (ZrO2), lithium fluoride (LiF), aluminum fluoride (AlF3), calcium fluoride (CaF2), or any other suitable material that transmits light and is resistant to an etch process used to form a pattern in fil
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