| http://www.w3.org/ns/prov#value | - Insulating film 13 can be provided by coating such as spin coating or roll coating, or vacuum deposition, of organic resins such as polyamide, polyimide, polyvinyl alcohol, polyurethane, polycarbonate or silicone resins, or inorganic materials such as Si3 N4, SiO2, SiO, Al2 O3 and Ta2 O3.
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