About: http://webisa.webdatacommons.org/272569182

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The ZrON layer may be deposited at a temperature between approximately 230??? C. and approximately 500??? C. The pressure in the ALD reactor may be maintained at between approximately 220 Pa and 270 Pa, such as at approximately 250 Pa.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk