About: http://webisa.webdatacommons.org/272876870

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The polycrystalline thin film structure of claim 1 wherein the film layer is a material selected from the group including silicon and silicon germanium.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com