About: http://webisa.webdatacommons.org/273760077

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 6 shows a flow of manufacturing a microdevice (e.g., a semiconductor chip such as an IC or LSI, a liquid crystal panel, a CCD, a thin film magnetic head, or a micromachine).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com