| http://www.w3.org/ns/prov#value | - FIG. 7 is a graph plotting the moving speed of the wafer stage 45 and the height of the second recovery port 105 and the hydrophobic surface 120relative to the wafer 40, shown in FIG. 6, with respect to time.In the above third exemplary embodiment, the height of the second recovery port 105 and the hydrophobic surface 120 relative to the wafer 40 is decided depending on the static contact angle of
|
