About: http://webisa.webdatacommons.org/277089018

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, reactive nitrogen molecules, ions, or other reactive species may be generated by analogous procedures to produce Si3N4 nanoclusters within a surface layer of a silicon substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com