About: http://webisa.webdatacommons.org/279144297

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, a trench may be formed in the substrate 20 and thereafter filled with appropriate insulating material, such as silicon dioxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com