About: http://webisa.webdatacommons.org/280732774

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the layer including the TFTs (the layer to be peeled), which is provided on the oxide layer 103 a, has a sufficient mechanical strength after obtaining the state of FIG. 6(A), the substrate 100 may be taken off.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com