About: http://webisa.webdatacommons.org/2834322

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Existing approaches to the design of phase-shifting masks tend to be based either on intuition or on brute force methodologies such as trial and error.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com