About: http://webisa.webdatacommons.org/285120077

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Additionially, for the purpose of incorporating more than two oxides, the thick barrier of the present invention is a better stopping layer than the thin barrier in Kimura's technique.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com