About: http://webisa.webdatacommons.org/288567368

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	First, as shown in FIG. 1, a deep trench 10 is formed in a substrate 12 using conventional techniques well known to those skilled in the art, for example, by photolithography and dry etching, such as reactive ion etching (RIE).
http://www.w3.org/ns/prov#wasQuotedFrom	google.es