About: http://webisa.webdatacommons.org/288718752

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, the first substrate is a laminated layer comprising an insulating layer between a plurality of silicon layers, and the first concave portion is formed by using the insulating layer as an etching stopper in the first step.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com