About: http://webisa.webdatacommons.org/290005260

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Other interconnect features such as vias and metal lines may also be formed by suitable processes known in the art.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com