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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 11 is a schematic cross sectional view illustrating the die piece 52 inserted into the recess 51 of the Si base 50.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com