About: http://webisa.webdatacommons.org/294529782

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	rofeature workpieceUS703325123 Aug 200425 Apr 2006Micron Technology, Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS703325312 Aug 200425 Apr 2006Micron Technology, Inc.Polishing pad conditioners having abrasives and brush elements, and associated systems and methodsUS70667926 Aug 200427 Jun 2006Micron Technology, Inc.Shap
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au