About: http://webisa.webdatacommons.org/295738970

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	a substrate holder located in said vacuum chamber, said substrate holder being rotatable about an axis generally normal thereto and including means for supporting the substrate thereon;
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com