About: http://webisa.webdatacommons.org/300239167

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this embodiment, the airtight member 303 such as an O-ring is interposed between the periphery of the support 314 and the substrate 101 to hold vacuum between the substrate and the support 314.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com