About: http://webisa.webdatacommons.org/300690232

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Current insulating materials such as silicon dioxide and fluorinated silicate glass (FSG) are approaching their limits as devices are squeezed ever closer on a chip.
http://www.w3.org/ns/prov#wasQuotedFrom	nist.gov