| http://www.w3.org/ns/prov#value | - The substrate holder assembly 250 generally includes a substrate holder 264 and a cathode contact ring 266. [0030] In one embodiment, the cathode contact ring 266 includes a conductive metal or a metal alloy, such as stainless steel, copper, silver, gold, platinum, titanium, tantalum, and other conductive materials, or a combination of conductive materials, such as stainless steel coated with plat
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