About: http://webisa.webdatacommons.org/305159905

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	That is, in the cleaning solution preparation part 1, any of the four kinds of cleaning solution is selectively produced to be supplied to the cleaning chamber 16 wherein objects to be cleaned such as semiconductor devices are washed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au