| http://www.w3.org/ns/prov#value | - The following description will discuss a structure in which, even when there is a change in tension to be applied to the first and second diaphragms 103, 104 due to a reason other than periodic electrochemomechanical expansion and contraction of the conductive polymer films, the tension of the first and second diaphragms 103, 104 is appropriately maintained by the elastic film portion 130 and the
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