About: http://webisa.webdatacommons.org/305260469

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The steps S17 and S18 are repeated also in case where the surface SIM image on the processed cross section is extremely coarse, but, in such a case, there is added for example an operation of gradually reducing the amount of ion beam.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com