About: http://webisa.webdatacommons.org/309764097

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The trenches are then filled with a trench filling 10 made of an electrically insulating material, e.g. with silicon dioxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es