About: http://webisa.webdatacommons.org/312674585

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The invention is particularly useful for inspecting substrates, such as reticles and photomasks.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com