About: http://webisa.webdatacommons.org/316112154

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Basically, siliciding is a process by which a metal silicon compound is formed in the surface of a silicon substrate 12 to reduce the surface resistance of the substrate 12.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com