| http://www.w3.org/ns/prov#value | - lectively and chemically cut the glass. [0094] As shown in FIG. 9, ultraviolet rays are applied to a photosensitive etching glass substrate 10 in an area other than the area where leads coupled later to the substrate are left. [0095] The substrate 10 has an ultraviolet ray radiated area 10a and an ultraviolet ray unradiated area 10b. [0096] As shown in FIG. 10, a number of leads are disposed in pa
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