About: http://webisa.webdatacommons.org/31930745

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIG. 12b, there is shown the fabrication of FIG. 12a, wherein the copper layer (19) has been removed by a planarization process such as CMP, leaving behind copper plugs (21) within the lined trenches.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es