About: http://webisa.webdatacommons.org/327809456

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Masking layer 28 may be a dielectric material, e.g. silicon nitride or silicon oxynitride, and may be etched selectively with respect to underlying pad oxide 26.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com