About: http://webisa.webdatacommons.org/329062224

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	But it was found impossible to apply this method to formation of fine patterns 12c on the substrate as in FIG. 1(d), if the pattern size is 1.0 ??m or less, especially 0.5 ??m or less.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com