| http://www.w3.org/ns/prov#value | - 251Aug 23, 2004Apr 25, 2006Micron Technology, Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS7033257Jul 21, 2004Apr 25, 2006Agere Systems, Inc.Carrier head for chemical mechanical polishingUS7048615 *May 26, 2005May 23, 2006United Microelectronics Corp.Pad backer and CMP process using the sameUS7070475Feb 1, 2005Jul 4, 20
|
