| http://www.w3.org/ns/prov#value | - Due to variables such as heat losses at the peripheral edges of the substrate 19 and the susceptor 20, the flow of reactant gas through the reaction chamber 10, and the like, the heating elements 48A, 48D, 78A and 78D may be ideally set to normally operate at temperatures which are offset, i.e. different than the desired operating temperature in the central area of the substrate 19 and the suscept
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